| 子系统 | 关键组件 |
|---|
| 光源/光学 | Camera, LED, Laser, PS (Power Supply), Shutter, Atten., Laser Bench, Lens, Metastable Deflector, Timed Ion Selector |
| 真空系统 | Source Housing, Gate, Load Lock, XY Stage, Mirror, Vent, Fore-line, Turbo Pump (CIDTurbo Main Turbo) |
| 检测/分析 | CIDBA Main BA, MSMS Optics Plate, TCG Plate, Sense Flight Housing, 4 Deflect, 2 Detect, Ion Optics Motherboard |
| 控制/电子 | CID Control, TCG, CPU, Pulse Generator, Vacuum I/O, Source Control, Motion Control Backplane, Card Cage, DC Distribution |
| 电源/配电 | Supply Box, DEDE 30 Kv x3, LVDC Power, AC Power Entry, Fans, Interlocks |
可行动点
- 该图可与 4800 控制电路维修手册对照,用于排查硬件故障
- 识别关键供电节点(30kV 高压、LVDC)和互锁电路位置
关联