title: 4347567 Loadlock Assy BOM及电路图说明
original_path: /工作相关/Personnal/2017工作/质谱相关/4800/进样系统/4347567 Rev C - Loadlock Assy - BOM and Schematic.pdf
file_size: 866 KB
total_pages: 9
processed_date: 2026-09-20
method: PDF文本提取(pdf-inspector mixed)
status: done
4347567 Loadlock Assy BOM及电路图说明
基本信息
- 物料号: 4347567
- 物料描述: ASSY, LOADLOCK
- 工厂/版本: US21 / 1 / 01
- 页面数: 9页
- 提取方式: pdf-inspector（mixed类型，文本层+表格）
组件清单（BOM）
该文档是TOF-TOF质谱仪Loadlock组件的物料清单（BOM），Rev C版本，包含约63个零部件。
主要机械部件
| 物料号 | 描述 | 数量 | 版本 |
|---|
| 4346443 | HOUSING, MACHINING LOADLOCK | 1 | PC C |
| 4346770 | BEZEL, MACHINING LOADLOCK | 1 | PC B |
| 4347178 | RAMP, UNLOAD LOADLOCK | 1 | PC B |
| 4347028 | LATCH, UNLOAD LOADLOCK | 1 | PC B |
| 4342918 | CAM, LINEAR 2, LOADLOCK | 1 | PC B |
| 4346891 | CAM, LOAD LOADLOCK | 1 | PC B |
| 4346892 | CAM, UNLOAD LOADLOCK | 1 | PC B |
| 4346887 | ROCKER, ARM LOADLOCK | 1 | PC B |
| 4346890 | COVER, LOAD LOADLOCK | 1 | PC B |
| 4347174 | BLOCK, DISENGAGE LOADLOCK | 1 | PC B |
| 4347175 | RAMP, DISENGAGE LOADLOCK | 1 | PC B |
| 4346893 | PLATE, MOUNTING DOOR | 2 | PC B |
| 4346889 | BRACKET, SENSOR LOADLOCK | 2 | PC B |
| 4342937 | ROCKER, PAD LOADLOCK | 1 | PC B |
| 4347025 | DOOR, GLASS, LOADLOCK | 1 | PC B |
| 4346888 | WINDOW, SENSOR, LOADLOCK | 2 | PC B |
真空接口件
| 物料号 | 描述 | 数量 |
|---|
| V504169 | CLAMP, NW 16 VAC FEEDTHRU, TOF-TOF | 1 |
| 4323695 | CLAMP, NW16 VACUUM FEEDTHRU, SPLIT | 1 |
| 4344478 | CLAMP, NW25 VAC FEEDTHRU | 2 |
| 4347261 | GUIDE, C-CHANNEL | 2 |
阀门与传感器
| 物料号 | 描述 | 数量 |
|---|
| 4344826 | ASSY, GATE VALVE LTS | 1 |
| V330129 | ACTUATOR, MAGNETIC | 1 |
| V330225 | SENSOR, MAGNETIC, FORM A, 59105 | 1 |
| 4358255 | ASSY, CBL EJECT SENSOR | 4 |
| 4358257 | ASSY, CBL LOAD SENSOR | 1 |
| 4346962 | ELBOW, NW16 SST | 1 |
| 4346959 | GAUGE, CT 100 LOW VACUUM | 1 |
标准件（O型圈、垫片等）
- O-RING系列：V200104, V200085, V200071, 4344486, 4344485 等
- CENTERING RING: V200071 (NW16) x3
- GASKET: V200077 (NW25, SS/Viton) x2
- 各类弹簧、螺钉、螺母、垫圈若干
真空管接头
| 物料号 | 描述 | 数量 |
|---|
| V204002 | ADAPTER, NW-16 X 1/4” | 1 |
| 4346969 | ADAPTER, NW25 TO 1/8” NPT ALUM | 1 |
| V202037 | FLANGE, BLANK, NW25B | 1 |
| V204003 | NIPPLE, 1/4” PIPE | 1 |
| V330415 | PURIFIER, OPTI-SOLV | 1 |
| V204100 | ELBOW, TAPERED THREAD 1/4 | 1 |
| V207001 | VALVE, SOLENOID, NC, 24VDC | 1 |
| 4352722 | VALVE, MKS 3/8 ORIFICE NW16 24VDC | 1 |
技术要点
- 真空密封要求：装配后需满足真空密封性，泄漏率不高于 2×10⁻⁸ cc/sec Helium
- 材料兼容性：关键密封件采用Viton材质，适配高真空环境
- 传感器配置：配备加载/卸载位置传感器（磁性传感）
- 阀门系统：集成Gate Valve和Solenoid Valve，用于真空隔离控制
关联文件